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検索キーワード:(件名: Microlithography Congresses)
該当件数:4件
Optical/laser microlithography : 3-5 March 1993, San Jose, California / John D. Cuthbert, chair/editor : sponsored and published by SPIE--the International Society for Optical Engineering
pt. 1,pt. 2. - Bellingham, Wash., USA : SPIE , c1993. - (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1927)
図書
Optical/laser microlithography V : 11-13 March 1992, San Jose, California / John D. Cuthbert, chair/editor : sponsored and published by SPIE--the International Society for Optical Engineering
pt. 1,pt. 2. - Bellingham, Wash., USA : SPIE , c1992. - (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1674)
Optical/laser microlithography IV : 6-8 March 1991, San Jose, California / Victor Pol, chair/editor : sponsored and published by SPIE--the International Society for Optical Engineering
Bellingham, Wash., USA : SPIE , c1991. - (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1463)
Optical/laser microlithography III : 7-9 March 1990, San Jose, California / Victor Pol, chair/editor : sponsored by SPIE--the International Society for Optical Engineering
Bellingham, Wash., USA : SPIE , c1990. - (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1264)