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検索キーワード:(件名: #Plasma-enhanced chemical vapor deposition)
該当件数:4件
Materials and processes for surface and interface engineering / edited by Yves Pauleau
Dordrecht : Boston : Kluwer Academic Publishers , c1995. - (NATO ASI series ; ser. E . Applied sciences ; no. 290)
図書
Plasma deposition of amorphous silicon-based materials / edited by Giovanni Bruno, Pio Capezzuto, Arun Madan
Boston : Academic Press , c1995. - (Plasma-materials interactions)
Synthetic diamond : emerging CVD science and technology / edited by Karl E. Spear, John P. Dismukes : sponsored by the Electrochemical Society, Inc
New York : J. Wiley , c1994. - (The Electrochemical Society series)
Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A. / editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess
Pittsburgh, Pa. : Materials Research Society , c1990. - (Materials Research Society symposium proceedings ; v. 165)