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検索キーワード:(件名: #Microlithography)
該当件数:9件
Optical/laser microlithography : 3-5 March 1993, San Jose, California / John D. Cuthbert, chair/editor : sponsored and published by SPIE--the International Society for Optical Engineering
pt. 1,pt. 2. - Bellingham, Wash., USA : SPIE , c1993. - (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1927)
図書
Optical/laser microlithography V : 11-13 March 1992, San Jose, California / John D. Cuthbert, chair/editor : sponsored and published by SPIE--the International Society for Optical Engineering
pt. 1,pt. 2. - Bellingham, Wash., USA : SPIE , c1992. - (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1674)
Selected papers on optical microlithography / Harry L. Stover, editor
: hardbound,: softbound. - Bellingham, Wash. : SPIE Optical Engineering Press , c1992. - (SPIE milestone series / Brian J. Thompson, general editor ; v. MS 55)
Handbook of VLSI microlithography : principles, technology, and applications / edited by William B. Glendinning, John N. Helbert
Park Ridge, N.J., U.S.A. : Noyes Publications , c1991. - (Materials science and process technology series)
Optical/laser microlithography IV : 6-8 March 1991, San Jose, California / Victor Pol, chair/editor : sponsored and published by SPIE--the International Society for Optical Engineering
Bellingham, Wash., USA : SPIE , c1991. - (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1463)
Excimer laser lithography / Kanti Jain
: pbk. - Bellingham, Wash., USA : SPIE Optical Engineering Press , c1990
Optical/laser microlithography III : 7-9 March 1990, San Jose, California / Victor Pol, chair/editor : sponsored by SPIE--the International Society for Optical Engineering
Bellingham, Wash., USA : SPIE , c1990. - (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1264)
Laser microfabrication : thin film processes and lithography / edited by Daniel J. Ehrlich, Jeffrey Y. Tsao
Boston : Tokyo : Academic Press , c1989
Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau
New York : Plenum Press , c1988. - (Microdevices : physics and fabrication technologies)