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検索キーワード:(件名: #Thin film devices)
該当件数:7件
LPCVD silicon nitride and oxynitride films : material and applications in integrated circuit technology / F.H.P.M. Habraken (ed.)
: N.Y.,: Berlin. - Berlin : New York : Springer-Verlag , 1991. - (Research reports ESPRIT ; Project 369 ; vol. 1)
図書
Ceramic thin and thick films / edited by Basavaraj V. Hiremath
Westerville, Ohio : American Ceramic Society , c1990. - (Ceramic transactions ; v. 11)
Polysilicon thin films and interfaces / editors, Theodore Kamins, Bruha Raicu, Carl V. Thompson
Pittsburgh, Pa. : Materials Research Society , c1990. - (Materials Research Society symposium proceedings ; v. 182)
Laser microfabrication : thin film processes and lithography / edited by Daniel J. Ehrlich, Jeffrey Y. Tsao
Boston : Tokyo : Academic Press , c1989
Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A. / editors, A. Chiang, M.W. Geis, L. Pfeiffer
Pittsburgh, Pa. : Materials Research Society , c1986. - (Materials Research Society symposia proceedings ; v. 53)
Plasma deposited thin films / editors, J. Mort, F. Jansen
Boca Raton, Fla. : CRC Press , c1986
Thin film device applications / Kasturi Lal Chopra and Inderjeet Kaur
New York : Plenum Press , c1983