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検索キーワード:(件名: #Sputtering )
該当件数:5件
Characteristics of sputtered particles, technical applications / edited by R. Behrisch and K. Wittmaack ; with contributions by R. Behrisch ... [et al.]
: gw,: us. - Berlin ; Tokyo : Springer-Verlag , c1991. - (Topics in applied physics ; v. 64 . Sputtering by particle bombardment / edited by R. Bhrisch and K. Wittmaack ; 3)
図書
Ion beam assisted film growth / edited by Tadatsugu Itoh
Amsterdam : Oxford ; Tokyo : Elsevier , 1989. - (Beam modification of materials ; 3)
Thin film processing and characterization of high-temperature superconductors, Anaheim, CA, 1987 / editors, James M.E. Harper, Richard J. Colton, Leonard C. Feldman
New York : American Institute of Physics , 1988. - (AIP conference proceedings ; no. 165 . American Vacuum Society series ; 3)
Physics, fabrication, and applications of multilayered structures / edited by P. Dhez and C. Weisbuch
New York : Plenum Press , c1988. - (NATO ASI series ; ser. B, Physics ; v. 182)
Thin film and depth profile analysis / edited by H. Oechsner : with contributions by H.-W. Etzkorn ... [et al.]
: U.S.,: Germany. - Berlin : New York ; Tokyo : Springer-Verlag , 1984. - (Topics in current physics ; 37)