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RT Book, Whole SR Print DC OPAC T1 Optical/laser microlithography IV : 6-8 March 1991, San Jose, California / Victor Pol, chair/editor : sponsored and published by SPIE--the International Society for Optical Engineering T2 Proceedings / SPIE -- the International Society for Optical Engineering A1 Pol, Victor A1 Society of Photo-optical Instrumentation Engineers YR 1991 FD c1991 SP xii, 754 p. K1 Lasers -- Industrial applications -- Congresses K1 Optical instruments -- Congresses K1 Microlithography -- Congresses PB SPIE PP Bellingham, Wash., USA SN 0819405620 LA English (英語) CL LCC:TA1677 CL DC20:621.36/6 NO Includes bibliographical references and index NO 書誌ID=B000087230; NCID=BA2608982X; LK [OPAC]https://lib.pu-toyama.ac.jp/opac/opac_link/bibid/B000087230 OL 30