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RT Book, Whole SR Print DC OPAC T1 Optical/laser microlithography III : 7-9 March 1990, San Jose, California / Victor Pol, chair/editor : sponsored by SPIE--the International Society for Optical Engineering T2 Proceedings / SPIE -- the International Society for Optical Engineering A1 Pol, Victor A1 Society of Photo-optical Instrumentation Engineers YR 1990 FD c1990 SP x, 586 p. K1 Lasers -- Industrial applications -- Congresses K1 Optical instruments -- Congresses K1 Microlithography -- Congresses PB SPIE PP Bellingham, Wash., USA SN 0819403113 LA English (英語) CL LCC:TA1677 CL DC20:621.36/6 NO Includes bibliographical references and index NO 書誌ID=B000087229; NCID=BA25246682; LK [OPAC]https://lib.pu-toyama.ac.jp/opac/opac_link/bibid/B000087229 OL 30