検索結果をRefWorksへエクスポートします。対象は1件です。
Export
RT Book, Whole SR Print DC OPAC T1 Selected papers on optical microlithography / Harry L. Stover, editor T2 SPIE milestone series / Brian J. Thompson, general editor A1 Stover, Harry L. YR 1992 FD c1992 VO : hardbound VO : softbound SP xviii, 676 p. K1 Semiconductors -- Design and construction K1 Microlithography K1 Masks (Electronics) PB SPIE Optical Engineering Press PP Bellingham, Wash. SN 0819409855 SN 0819409863 LA English (英語) CL LCC:TK7871.85 CL DC20:621.3815/2 NO Papers originally published in various journals, 1974-1991 NO Includes bibliographical references and index NO 書誌ID=B000086985; NCID=BA25780639; LK [OPAC]https://lib.pu-toyama.ac.jp/opac/opac_link/bibid/B000086985 OL 30