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RT Book, Whole SR Print DC OPAC T1 Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. / editors, R.E. Howard ... [et al.] T2 Materials Research Society symposia proceedings A1 Howard, R. E. (Richard Edwin), 1948- A1 Symposium on the Science and Technology of Microfabrication A1 Materials Research Society. Meeting A1 Materials Research Society YR 1987 FD c1987 SP xvii, 373 p. K1 Integrated circuits -- Very large scale integration -- Design and construction -- Congresses PB Materials Research Society PP Pittsburgh, Pa. SN 0931837421 LA English (英語) CL LCC:TK7874 CL DC19:621.381/73 NO Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting NO Includes bibliographies NO 書誌ID=B000081239; NCID=BA01149091; LK [OPAC]https://lib.pu-toyama.ac.jp/opac/opac_link/bibid/B000081239 OL 30