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RT Book, Whole SR Print DC OPAC T1 Optical/laser microlithography V : 11-13 March 1992, San Jose, California / John D. Cuthbert, chair/editor : sponsored and published by SPIE--the International Society for Optical Engineering T2 Proceedings / SPIE -- the International Society for Optical Engineering A1 Cuthbert, John D. A1 Society of Photo-optical Instrumentation Engineers YR 1992 FD c1992 VO pt. 1 VO pt. 2 SP 2 v. (x, 907 p.) K1 Lasers -- Industrial applications -- Congresses K1 Optical instruments -- Congresses K1 Microlithography -- Congresses PB SPIE PP Bellingham, Wash., USA SN 0819408298 LA English (英語) CL LCC:TA1677 CL DC20:621.36/6 NO Includes bibliographical references and index NO 書誌ID=B000077577; NCID=BA26388944; LK [OPAC]https://lib.pu-toyama.ac.jp/opac/opac_link/bibid/B000077577 OL 30