検索結果をRefWorksへエクスポートします。対象は1件です。
Export
RT Book, Whole SR Print DC OPAC T1 Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A. / editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess T2 Materials Research Society symposium proceedings A1 Lucovsky, G. A1 Ibbotson, Dale E. A1 Hess, Dennis W. YR 1990 FD c1990 SP ix, 250 p. K1 Plasma-enhanced chemical vapor deposition -- Congresses K1 Integrated circuits -- Design and construction -- Congresses PB Materials Research Society PP Pittsburgh, Pa. SN 1558990534 LA English (英語) CL LCC:TS695.15 CL DC20:621.381/52 NO Includes bibliographical references and index NO 書誌ID=B000050487; NCID=BA11202521; LK [OPAC]https://lib.pu-toyama.ac.jp/opac/opac_link/bibid/B000050487 OL 30