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RT Book, Whole SR Print DC OPAC T1 Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) / edited by Gary E. McGuire T2 Materials science and process technology series A1 McGuire, G. E. YR 1988 FD c1988 SP xiii, 675 p. K1 Integrated circuits -- Very large scale integration -- Design and construction -- Handbooks, manuals, etc PB Noyes Publications PP Park Ridge, N.J., U.S.A. SN 0815511507 LA English (英語) CL LCC:TK7874 CL DC19:621.395 NO Includes bibliographies and index NO 書誌ID=B000087492; NCID=BA0500408X; LK [OPAC]https://lib.pu-toyama.ac.jp/opac/opac_link/bibid/B000087492 OL 30