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RT Book, Whole SR Print DC OPAC T1 Characteristics of sputtered particles, technical applications / edited by R. Behrisch and K. Wittmaack ; with contributions by R. Behrisch ... [et al.] T2 Topics in applied physics A1 Behrisch, Rainer A1 Wittmaack, K. YR 1991 FD c1991 VO : gw VO : us SP xiii, 410 p. K1 Sputtering (Physics) K1 Solids -- Effect of radiation on K1 Surfaces (Physics) -- Effect of radiation on PB Springer-Verlag PP Berlin ; Tokyo SN 3540534288 SN 0387534288 LA English (英語) CL LCC:QC176.8.S72 CL DC19:530.4/1 NO Includes bibliographical references and indexes NO 書誌ID=B000062278; NCID=BA13027998; LK [OPAC]https://lib.pu-toyama.ac.jp/opac/opac_link/bibid/B000062278 OL 30