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RT Book, Whole SR Print DC OPAC T1 Ion implantation and beam processing / edited by J.S. Williams, J.M. Poate A1 Williams, J. S. (James Stanislaus) A1 Poate, J. M. YR 1984 FD 1984 SP xi, 419 p. K1 Ion implantation K1 Ion bombardment K1 Semiconductor doping K1 Electron beams PB New York : Academic Press PP Sydney SN 0127569804 LA English (英語) CL LCC:QC702.7.I55 CL DC19:621.3815/2 NO Includes bibliographical references and index NO 書誌ID=B000060036; NCID=BA06909986; LK [OPAC]https://lib.pu-toyama.ac.jp/opac/opac_link/bibid/B000060036 OL 30