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RT Book, Whole SR Print DC OPAC T1 Excimer laser lithography / Kanti Jain A1 Jain, Kanti, 1948- YR 1990 FD c1990 VO : pbk SP x, 212 p. K1 Excimer lasers -- Industrial applications K1 Microlithography PB SPIE Optical Engineering Press PP Bellingham, Wash., USA SN 0819402710 SN 0819402729 LA English (英語) CL LCC:TA1695 CL DC20:621.381/531 NO Includes bibliographical references (p. 193-207) NO 書誌ID=B000049335; NCID=BA45714579; LK [OPAC]https://lib.pu-toyama.ac.jp/opac/opac_link/bibid/B000049335 OL 30