OPAC

Silicon integrated circuits / edited by Dawon Kahng
(Applied solid state science : advances in materials and device research ; Supplement, 2)

巻　次	配架場所	請求記号	登録番号	コメント	刷　年	状　態	利用注記	ISBN	予約	請求メモ
pt. C	射水-1階-洋書	549.8\|\|SI4	100797075						予約		予約

内容注記	pt. A: Physics of the MOS transistor / John R. Brews Nonvolatile memories / Yoshio Nishi and Hisakazu Iizuka The properties of silicon-on-sapphire substrates, devices, and integrated circuits / Alfred C. Ipri pt. B: Physics and chemistry of impurity diffusion and oxidation of silicon / Richard B. Fair Silicon power field controlled devices and integrated circuits / B. Jayant Baliga pt. C. Transient thermal processing of silicon / G.K. Celler and T.E. Seidel Reactive ion-beam etching and plasma deposition techniques using electron cyclotron resonance plasmas / Seitaro Matsua Physics of VLSI processing and process simulation / W. Fichtner
一般注記	Includes bibliographies and indexes
件　名	LCSH:Metal oxide semiconductors LCSH:Semiconductors storage devices LCSH:Integrated circuits
分　類	LCC:TK7871.99.M44 DC19:621.381/71
書誌ID	B000049148
ISBN	0120029545
NCID	BA00942956