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Advances in resist technology and processing X : 1-2 March 1993, San Jose, California / William D. Hinsberg, chair/editor : sponsored and published by SPIE--the International Society for Optical Engineering
(Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1925)

データ種別	図書
出版者	Bellingham, Wash., USA : SPIE
出版年	c1993
本文言語	英語
大きさ	xi, 738 p. : ill. ; 28 cm
著者標目	Hinsberg, William D. Society of Photo-optical Instrumentation Engineers